Preparation of hydrogenated amorphous silicon tin alloys

نویسندگان

  • M. Vergnat
  • G. Marchal
  • M. Piecuch
چکیده

2014 This paper describes a new method to obtain hydrogenated amorphous semiconductor alloys. The method is reactive co-evaporation. Silicon tin hydrogenated alloys are prepared under atomic hydrogen atmosphere. We discuss the influence of various parameters of preparation (hydrogen pressure, tungsten tube temperature, substrate temperature, annealing...) on electrical properties of samples. Revue Phys. Appl. 22 (1987) -1808 DÉCEMBRE 1987, PAGE 1803 Classification Physics Abstracts 72.80N

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تاریخ انتشار 2016